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UP Mikro-Bearbeitungsmaschine mit Laser
Ultra-Precision Micro Machining Center with Laser

Features and Benefits at a Glance:
  • Micro structuring
  • Hydrostatic bearing technology
  • Airborne measurement axis with laser sensor
  • Process camera
  • Granite machine base for mechanical stability
  • Vibration isolation system
  • Resolution: 10 nm

All metals, plastics and crystals.

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The MLC 1100 series is equipped with a natural granite base. The X-Y-axis cross slide is equipped with hydrostatic bearings. With the linear drive in these axes a dynamic structuring of the work piece is possible. A vacuum- / thermo-chuck or other equipment can be attached to Y-axis slide.

The micro laser machining axis (Z2) has an assembly platform, which allows to assemble different applications (e.g. focusing systems, scanners, beam benders and dynamic focusing units) as single units or in combination. Additional the individual beam guiding with the integrated beam switches afford the possibility to integrate up to three laser sources in the machine.

The airborne axis Z1 with its integrated measurement devices (e.g. laser sensor, camera systems) allows the control of the manufactured structures directly on the machine, and later on, if necessary, a correction of the manufacturing program.